PLASMA RESISTANT MEMBER AND PRODUCING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a plasma resistant member which is satisfactorily durable against the exposure with the plasma of low pressure and high density and is excellent in the transmission of high-frequency, and a producing method of the plasma resistant member. SOLUTION: The plasma resistant member is characterized in that yttrium of 1-50 wt.% is dispersed and contained in a quartz glass component. Therein, the plasma resistant member desirably has a surface roughness Ra of <=5μm.