| 摘要 |
PROBLEM TO BE SOLVED: To prevent different kinds of drainages from being mixed in a drainage pipe by monitoring the opening/closing conditions of a drainage switching valve at all times, to improve recycling by increasing the recovery rate of processing liquid and to suppress damages to a body to be processed. SOLUTION: This liquid processor for supplying the different kinds of processing liquids to a semiconductor wafer W housed inside a processing vessel 22, performing drainage and executing a processing is provided with a connection pipe 7d communicating the processing vessel 22 and a plurality of the drainage pipes 4, 5 and 6 corresponding to the different kinds of the processing liquid; the drainage switching valve 10 interposed to the connection pipe 7d for switching the communication of the processing vessel 22 and the respective drainage pipes 4, 5 and 6; and a changeover detecting sensor 11, provided on the drainage switching valve 10 for detecting a changeover state to the respective drainage pipes 4, 5 and 6 and the changeover detecting sensor 11 for reporting the changeover state of the drainage switching valve 10, on the basis of detected signals from the changeover detecting sensor 11.
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