| 摘要 |
PURPOSE: A pattern testing apparatus is provided to maximize space utilization, while shortening time taken for loading and unloading of cassette. CONSTITUTION: A pattern testing apparatus comprises a processor unit(40) for performing defect test for the black matrix pattern formed at a glass substrate; a port loader(46) for loading or unloading a cassette(60) where the glass substrate is mounted; a robot arm(42) for extracting the glass substrate from the cassette, loading the extracted glass substrate to the processor unit, unloading the glass substrate from the processor unit upon completion of test, and loading the glass substrate to the original position within the cassette; a buffer port(44) for temporarily storing the cassette until the cassette is unloaded after completion of the defect test for the black matrix pattern; and a cassette shift unit(66) for transferring the cassette between the buffer port and the port loader.
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