| 摘要 |
PROBLEM TO BE SOLVED: To drive a word line to a selection state at a high speed, without making the array occupancy area or manufacturing processes increased. SOLUTION: A first layer metal wiring 7 of the lower layer of a third layer metal wiring 9 which serves as a main word line MWL is used as wiring for shunting and connected to first layer polysilicon wiring 3, constituting a sub word line SWL electrically at prescribed intervals. By applying both a hierarchical word structure and a word line piping structure, the sub word line is driven to the selected state at a high speed.
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