发明名称 |
Method of and an apparatus for regulating the temperature of an electrostatic chuck |
摘要 |
A refrigeration system regulates the temperature of an electrostatic wafer chuck disposed in a process chamber. The refrigeration system includes a heat exchanger disposed in a heat exchange relationship with the electrostatic chuck, a refrigerator, a temperature sensor, and a temperature controller for controlling the refrigerator to cool the coolant withdrawn from the heat exchanger to a desired temperature in response to the temperature detected by the temperature sensor. The heat exchanger forms a coolant passageway inside the electrostatic chuck, and the refrigerator is disposed outside the process chamber The temperature sensor is disposed within the body of the electrostatic chuck. The temperature of the electrostatic chuck can be regulated so as to be maintained nearly constant because the temperature used to control the cooling of the coolant is measured directly from the body of the electrostatic chuck.
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申请公布号 |
US2002174667(A1) |
申请公布日期 |
2002.11.28 |
申请号 |
US20020134729 |
申请日期 |
2002.04.30 |
申请人 |
KIM JIN-MAN;YANG YUN-SIK;CHUN SANG-JUN;MIN YOUNG-MIN |
发明人 |
KIM JIN-MAN;YANG YUN-SIK;CHUN SANG-JUN;MIN YOUNG-MIN |
分类号 |
F25D17/02;H01L21/00;H01L21/683;(IPC1-7):F25D17/02;F25B1/00 |
主分类号 |
F25D17/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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