| 摘要 |
PURPOSE: A substrate joining device is provided to prevent substrate from being pressed by spacers at portions where impurities are existing, by forming guide grooves on surface plates to insert the impurities. CONSTITUTION: A substrate joining device includes a first surface plate(22) to secure a first substrate(28), and a second surface plate(30) to secure a second substrate(24) scatter with spacers(26) for keeping a predetermined distance from the first substrate, wherein the first and second surface plates are formed with guide grooves(31) in the shape of grid by a uniform interval on surfaces for inserting impurities(40) remaining on the first and second surface plates. |
