| 发明名称 |
LINEAR MOTOR AND STAGE APPARATUS |
| 摘要 |
PROBLEM TO BE SOLVED: To make deflection of a carriage 11X of an X linear motor less likely to be generated, while increase in the longitudinal dimension and weight is prevented in an X-Y-θstage apparatus. SOLUTION: Support sliding members of the X linear motor are arranged in at least three portions in the stage apparatus, and positioned at nearly equal intervals.
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| 申请公布号 |
JP2002359961(A) |
申请公布日期 |
2002.12.13 |
| 申请号 |
JP20010166055 |
申请日期 |
2001.06.01 |
| 申请人 |
HITACHI METALS LTD;HITACHI METALS KIKO CO LTD |
发明人 |
TOYOSAKI NORIO;KATO HISASHI;HASHIMOTO HIROSHI |
| 分类号 |
G12B5/00;G03F7/20;H01L21/027;H02K41/02;H02K41/03;(IPC1-7):H02K41/02 |
主分类号 |
G12B5/00 |
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