发明名称 OPTICAL MEMBER, PROCESS FOR PRODUCING THE SAME, AND PROJECTION ALIGNER
摘要 <p>An optical member made of fluoride crystals, wherein the angle between the &lt;111&gt; axis of the fluoride crystals and the optical axis is 10 to 36° and the member has an optical-axis-direction strain of 2.0 nm/cm or less. The optical member is effective in improving the yield and the accuracy of processing in optical-member production steps. It can attain sufficiently high optical properties.</p>
申请公布号 WO2002103413(P1) 申请公布日期 2002.12.27
申请号 JP2001005132 申请日期 2001.06.15
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