发明名称 Semiconductor device having channel cut layers provided at different depths
摘要 A semiconductor device includes an element isolating insulation film having different depths depending on locations where it is formed. A plurality of channel cut layers are formed in one active region in a direction of depth.
申请公布号 US2003057498(A1) 申请公布日期 2003.03.27
申请号 US20020218447 申请日期 2002.08.15
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YAMASHITA TOMOHIRO
分类号 H01L21/76;H01L21/762;H01L21/8238;H01L27/08;H01L27/092;(IPC1-7):H01L29/76 主分类号 H01L21/76
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