| 摘要 |
PROBLEM TO BE SOLVED: To provide an organozirconium compound for metal organic chemical vapor deposition having a lower decomposition temperature than that of a conventional Zr compound and the decomposition temperature approximating to that of a Pb compound, leaving a small amount of vaporization residues by the organozirconium compound alone, scarcely reacting with the Pb compound even when mixed therewith and resultantly leaving a small amount of vaporization residues. SOLUTION: This organozirconium compound for the metal organic chemical vapor deposition is represented by the formula (I) in which aβ-diketone group and a tertiary alkoxy group having a ketone group is bound to zirconium (wherein, R1 , R2 , R3 , R4 and R5 are each a 1-5C hydrocarbon group or a fluorinated hydrocarbon group; and n is an integer of 1-3).
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