| 发明名称 |
METHOD FOR MAKING ULTRA-NARROW READ SENSOR AND READ TRANSDUCER DEVICE RESULTING THEREFROM |
| 摘要 |
Disclosed are methods for making ultra-narrow track width (TW) read sensors, and read transducers incorporating such sensors. The methods utilize side-wall line patterning techniques to prepare ultra-narrow mill masks that can be used to prepare the ultra-narrow read sensors. |
| 申请公布号 |
US2016329064(A1) |
申请公布日期 |
2016.11.10 |
| 申请号 |
US201615197503 |
申请日期 |
2016.06.29 |
| 申请人 |
Western Digital (Fremont), LLC |
发明人 |
WANG MIAO;GAO WEI;YANG XIAOYU;ROY ANUP G.;ZHANG WEI;SU WENCHENG;ZHANG ZHIHONG;YUAN JAMES;LI GUANXIONG;MAO MING;SUN HAI;MIAO LINGYUN |
| 分类号 |
G11B5/31 |
主分类号 |
G11B5/31 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. An apparatus, comprising:
a read sensor comprising a patterned read sensor stack on a substrate, wherein the read sensor stack comprises a plurality of layers; and a mill mask above the read sensor stack, wherein the mill mask is a line structure deposited via a side-wall line patterning technique. |
| 地址 |
Fremont CA US |
