| 摘要 |
There is disclosed a transmission electron microscope that uses an accelerating voltage on the order of 200 kV but is capable of correcting spherical aberration. This microscope has an illumination lens and an auxiliary illumination lens that are interlocked to form an electron diffraction image of a specimen at a fixed position independent of the current density on the specimen. A first hexapole element is mounted at the position where the electron diffraction image is formed. A second hexapole element is placed in a position conjugate with the first hexapole element. A doublet lens is disposed between these two hexapole elements.
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