发明名称 Mikrostruktur med bevegelig masse
摘要 A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.
申请公布号 NO20031998(D0) 申请公布日期 2003.05.02
申请号 NO20030001998 申请日期 2003.05.02
申请人 HARADA, MUNEO 发明人 HASHIMOTO, HIROYUKI;OOASA, TAKAHIKO;IKEUCHI, NAOKI;HARADA, MUNEO
分类号 B81B3/00;B81B7/00;G01C19/56;G01C19/5719;G01P15/08;G01P15/12;G01P15/18 主分类号 B81B3/00
代理机构 代理人
主权项
地址