METHOD FOR PRODUCING SUPERCONDUCTING MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a superconducting material exhibiting superconductive characteristics without requiring any annealing by forming an MgB2 film as an as-grown film by simultaneous sputtering of Mg and B. SOLUTION: A magnesium target and a boron target are placed oppositely to a substrate in a gas, a voltage is applied between the substrate and the magnesium target and between the substrate and the boron target. By simultaneous sputtering of magnesium and boron occurring by gas discharge, a compound film of magnesium and boron only of MgB2 or a compound film of magnesium and boron having a compositional ratio different from that of MgB2 or a compound film of magnesium and boron containing at least one of simple substance Mg or simple substance B and MgB2 is formed on a substrate thus producing a superconducting film of compound without requiring any annealing.