发明名称 ELECTRON HEATING HOTPLATE DEVICE
摘要 PROBLEM TO BE SOLVED: To have a temperature of a heated sample rapidly raised and lowered. SOLUTION: With the electron heating hotplate device composed of a conductive hotplate 1 in contact with a heated sample and a cathode substrate 4, carbon nanotube is applied on the surface of the cathode substrate. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003178864(A) 申请公布日期 2003.06.27
申请号 JP20010402604 申请日期 2001.12.11
申请人 MUSASHINO ENG:KK 发明人 MIYAMOTO KAZUO
分类号 H05B7/08;H01L21/027;H05B7/00;(IPC1-7):H05B7/08 主分类号 H05B7/08
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