发明名称 Balanced momentum probe holder
摘要 A balanced momentum probe holder in an apparatus for characterizing a sample surface has first and second members each having extensible and retractable distal ends. The distal ends extend or retract substantially simultaneously in response to a signal from a detector thus balancing the momentums of the first and second members and reducing the net momentum of the probe holder to essentially zero. Balancing the momentum of the probe holder reduces parasitic oscillations in the apparatus thus enhancing performance.
申请公布号 US6590208(B2) 申请公布日期 2003.07.08
申请号 US20010766555 申请日期 2001.01.19
申请人 VEECO INSTRUMENTS INC. 发明人 MASSIE JAMES R.
分类号 G01B21/00;G01Q10/00;G01Q10/04;G01Q10/06;G01Q60/24;G01Q70/00;G01Q70/02;G01Q70/04;(IPC1-7):G01N13/12 主分类号 G01B21/00
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