PROBE FOR LASER MEASUREMENT AND LASER MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To measure with high accuracy even when the positional change and shape change of a specimen have occurred. SOLUTION: In this laser measurement device, the one side of the specimen 9 is continuously irradiated with laser light from a laser light source 1. The nondestructive testing of the specimen 9 is performed by continuously measuring the minute vibration of the surface of the specimen 9 by the ultrasonic signal for the ultrasonic flaw detection of the specimen 9 as the change in phase or frequency before and after the reflection of the laser light reflected from the specimen 9 with a measuring instrument 13. The laser measurement device is provided with a prove 14 for a laser measurement. The prove 14 is arranged at a prescribed interval from the specimen 9. The prove 14 is composed of the optical system which consists of both sides telecentric system 14A wherein the light becomes parallel for the light axis (probe light axis) on both of the object side and the image side as a probe for the laser measurement which becomes the medium of the irradiation of the specimen 9 with the laser light and the receiving light of the reflection laser light from the specimen 9. COPYRIGHT: (C)2003,JPO