| 摘要 |
PROBLEM TO BE SOLVED: To use a luminous flux separation optical system smaller in size than the conventional polarizing beam splitter and to secure an optical path leading to an image surface from a concave reflection mirror to be long. SOLUTION: Luminous flux from an object surface 1 is made incident on the polarizing beam splitter 6 through a 1st converging group G<SB>1</SB>, the luminous flux reflected by the splitter 6 is reflected by the concave reflection mirror M<SB>2</SB>and forms the image of a pattern on the surface 1 inside the reflection mirror 2. After the luminous flux from the image of the pattern is transmitted through the splitter 6, it forms the image of the pattern on the image surface 5 through a 3rd converging group G<SB>3</SB>. COPYRIGHT: (C)2003,JPO
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