| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic heater excellent in durability and capable of easily securing power feeding from a power feeding terminal and of always providing stable heat generation/heat radiation. SOLUTION: This manufacturing method is characterized in comprising: a process for disposing a resistance heating element 2 on a surface of a first defatted aluminum nitride molding 5a; a process for positioning and disposing, on a disposing surface of the heating element 2, a second defatted aluminum nitride molding 5b with power feeding terminal insertion holes corresponding to the terminal parts of the heating element 2 bored; a process for inserting and filling power feeding terminal forming green compact 6 in the terminal insertion holes; and a process for heating and pressing the moldings 5a and 5b to bake the surfaces to integrate them into a ceramic heater body 5, and for converting the green compact 6 in the terminal insertion holes into sintered bodies 6'. COPYRIGHT: (C)2003,JPO
|
