| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation source for an evaporator by which dispersion of luminous efficiency is suppressed by forming an organic thin film on a substrate so that its thickness may become uniform, the evaporator using the evaporation source, and a manufacturing method of an organic EL element. SOLUTION: A container, in which an evaporation material is accommodated, and a heating medium accommodated in the container with pores, are prepared, and the porous parts are filled up with the evaporation material. Moreover, by providing the container in which the evaporation material is accommodated, the heating medium accommodated in the container with pores, an evaporation source filled up with the evaporation material in the porous parts, and a heating means to heat the evaporation material, and by making the evaporation material evaporate by the heating means, the evaporation films are deposited on a substrate. Furthermore, the manufacturing method of the organic EL elements includes a production process in which an evaporated film is deposited on a substrate by making an organic luminescent material contained in the container evaporate by heating with the medium accommodated in the container and with pores, and at least an electrode forming production process in which an electrode, by which an electric field is impressed on the evaporated film, is formed. COPYRIGHT: (C)2003,JPO
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