| 摘要 |
FIELD: cryogenic microelectronics. SUBSTANCE: method includes vacuum spraying of material used for manufacturing Josephson- effect component and its evaporation on insulating substrate. In the process substrate made of ground crystal is covered with potassium oleate (C18H33O2K). Then spectrally pure graphite is sprayed in electrical arc discharge at arc current of 15-30 A through electrodes with voltage across them being 10-15 V, evaporation speed being 5-10 A/s. Evaporation is conducted until carbon film, 500-2000 A thick, is deposited on potassium oleate film. Then substrate is placed in distilled water and after potassium oleate film dissolution and separation of carbon film from substrate this carbon film is picked up from water surface, dried out at room temperature, placed in vacuum furnace with residual steam pressure not over 10-4-10-5 torr, and annealed at 800-1000 C for 5-10 h. Then film is stuck onto insulating substrate and contacts are evaporated on carbon film surfaces. EFFECT: facilitated manufacture, enhanced sensitivity and operating temperature of apparatus. 2 cl
|
