OBJECTIVE LENS, COMBINATION OF OBJECTIVE LENS, AND METHOD OF ADJUSTING OPTICAL SYSTEM USING OBJECTIVE LENS

摘要

PROBLEM TO BE SOLVED: To provide an objective lens capable of recognizing in which position within a visual field the axial positions of optical systems exist and capable of making adjustment so as to nearly align the positions within the visual field where the prescribed aberration state is attained in the respective optical systems. SOLUTION: The combination has the objective lens 2 and an index member 1 having an index indicating a reference position and the index member 1 is arranged in the front focal position of the objective lens 2 or near the same. The reference objective lens 10 formed in such a manner is mounted on the apparatus having an imaging system 14 and the image of the index indicating the reference position is formed by the imaging system 14. The position of the index in the formed image is calculated and this position is stored. The prescribed optical system 11 is exchanged with the objective lens 2 and is mounted on the apparatus having the imaging system 14 and the aberrations of the optical system 11 are measured. The optical system 11 is so adjusted that the aberrations in the position corresponding to the stored position attain the prescribed aberration state in accordance with this measurement. COPYRIGHT: (C)2003,JPO