| 摘要 |
PROBLEM TO BE SOLVED: To stably detect a semi-conductor wafer having strength of reference strength or less. SOLUTION: Corner parts 1a, 1b on one diagonal line in the polycrystaline semi-conductor wafer 1 of a substantial quadrangle are supported with fixed support pins 8A, 8B from an under face side of the polycrystaline semi-conductor wafer 1, and corner parts 1c, 1d on the other diagonal line in the polycrystaline semi-conductor wafer 1 are supported with movable support pins 11A, 11B from the under face side of the polycrystaline semi-conductor wafer 1. A load is applied to the corner parts 1c, 1d on the other diagonal line in the polycrystaline semi-conductor wafer 1 from an upper face side of the polycrystaline semi-conductor wafer 1. A substantially uniform load is applied over the whole of the polycrystaline semi-conductor wafer 1. COPYRIGHT: (C)2003,JPO
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