| 摘要 |
PROBLEM TO BE SOLVED: To provide a resist-peeling device in which the consumption of resist- peeling liquid due to evaporation is reduced and wasteful power consumption can be reduced, and to provide the controlling method of the resist-peeling device. SOLUTION: In the resist-peeling device 1, a peeling liquid soaking part 11 having a peeling liquid tank 22 filled with peeling liquid 21, a circulation pump 23 circulating the peeling liquid, a temperature sensor 24, a heater 25 heating the peeling liquid tank, a temperature controller 26 and a temperature control circuit 27 is used, the temperature of the peeling liquid tank filled with the peeling liquid is set to be a resist peeling temperature when peeling is performed and it is set to be a standby temperature when the peeling is on standby. Since the temperature of the peeling liquid tank can be controlled at the resist-peeling and on the standby of the peeling, the consumption of resist-peeling liquid due to evaporation can be reduced, and wasteful power consumption at the standby can be reduced. COPYRIGHT: (C)2004,JPO |
