ELECTRONIC COMPONENT HAVING ELECTRODES, ITS MANUFACTURING METHOD AND COMMUNICATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a surface acoustic wave device and its manufacturing method which reduces the insertion loss and improves the balance between balancing signal terminals. SOLUTION: A surface acoustic wave filter 12 having interdigital electrodes 31, 32, 33 on a piezoelectric substrate 11 is sealed in a thermally sealing package by heating. The electrodes 31, 32, 33 comprise a first metal layer 1 formed on the piezoelectric substrate 11 and a second metal layer 2 mainly containing aluminum, formed on the first metal layer 1. The first metal layer 1 contains at least one metal as a main component, selected among titanium, chrome, copper, nickel and magnesium. An oxygen-diffused layer is formed on the first metal layer 1 at the substrate 11 side. COPYRIGHT: (C)2004,JPO