REFERENCE PLATE HOUSING TYPE SPECIMEN SUPPORTING STAGE, SPECIMEN WAVE FRONT MEASURING DEVICE USING THE SAME AND MEASURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To quickly and safely perform the installation exchange of a reflection type reference plate and a specimen to a measuring part and the measurement of a surface to be tested and to lower costs by combining a reference plate housing part housing the reflection type reference plate and a lid body supporting the specimen and mounting the reflection type reference plate on an elastic sheet spread inside the reference plate housing part. SOLUTION: An interferometer device 100 is composed of a laser interferometer body 1, a sample stage 10 and a computer part 20 performing the analysis operation of interference fringe image data. The sample stage 10 is provided with the reference plate housing part 9 in the shape of a container with a bottom part and a sheet 5 for mounting the reflection type reference plate 4 is spread at the bottom part of the inner chamber 11 of the reference plate housing part 9. As the lid body closing the upper part of the inner chamber 11, a sample supporting part 3 is freely attachably and detachably arranged. The sample supporting part 3 is supported by a rib 12 provided around the upper part of the inner wall part of the inner chamber 11 and disposed so as to provide a clearance 13 between the bottom surface and the reflection type reference plate 4 in that state. COPYRIGHT: (C)2004,JPO