| 摘要 |
PROBLEM TO BE SOLVED: To provide a support mechanism for a raising and lowering member which enhances a measurement accuracy of the raising and lowering member, and to provide a measuring machine whose measurement accuracy is enhanced. SOLUTION: A self-aligning ball bearing 41 fixed to a support shaft 28 used to support the raising and lowering member is fitted to a slide pad 36. Compressed air is supplied through air holes 43 to a slide face 40 formed between the slide pad 36 and a bearing member 37 fixed to a cross beam 26, and an air film is formed. When the raising and lowering member is raised and lowered, a force Pm in the horizontal direction generated in the support shaft 28 is reduced by sliding the slide pad 36 on the slide face 40 via the air film. An angle fluctuation generated due to a movement in the horizontal direction of the support shaft 28 is absorbed by the ball bearing 41. COPYRIGHT: (C)2004,JPO
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