| 摘要 |
PROBLEM TO BE SOLVED: To easily confirm forming method of pattern pitch with small uncertainty, a means for giving a standard value and secureness of traceability of specific pattern pitch. SOLUTION: A square pattern is formed by using lithography method, a standard value is given with a length measurement SEM of which the pattern pitch is calibrated with a standard value and uncertainty is added. For confirming the chain of traceability of a specific pattern, discrimination mark or number was given to all pattern pitches, chips and wafers. COPYRIGHT: (C)2004,JPO
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