| 摘要 |
PROBLEM TO BE SOLVED: To provide a batch type electric heating atmospheric furnace, and its atmosphere switching method for shortening time required for switching an atmosphere. SOLUTION: This batch type electric heating atmospheric furnace has a vacuum system 9 for substantially putting the inside of a furnace chamber 1 in a vacuum state, a gas introducing system 12 for introducing prescribed atmospheric gas into the furnace chamber, and an exhaust system 16 for exhausting the gas in the furnace chamber to the outside, and heats the atmosphere in the furnace chamber by an electric heater 6 while switching the atmosphere in time series, and is characterized by having a mechanism for respectively and independently controlling a gas introducing quantity and an exhaust quantity of main passages and sub-passages by arranging the main passages 18a and 19a for directly introducing the atmospheric gas into the furnace chamber, and exhausting the gas from the inside of the furnace chamber, and the sub-passages 18b and 19b for introducing the atmospheric gas into a space between a fire resistant layer and a heat insulating layer for surrounding the furnace chamber and a furnace shell for surrounding the heat insulating layer, and exhausting the gas from the space. COPYRIGHT: (C)2004,JPO
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