| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing cell device capable of being embodied in a small size and enhancing the positioning speed. SOLUTION: The processing cell device is structured so that a table 28 holding any work 41 is attached to a linear motor 24 and supported rotatably round theθ-axis, and the linear motor 24 is supported capable of making straight motions by a ball screw 15 in the Y-direction in such a way as approaching and going apart from the processing point together with the table 28. COPYRIGHT: (C)2004,JPO
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