| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for fabricating a ceramics green sheet which is free from the generation of a partial drawdown and creases in a cut/released ceramics green sheet and prevents the reliability of an electronic part from deteriorating. SOLUTION: This method comprises the cutting step to fix the ceramics green sheet 2 formed on a carrier film 1 on a cutting table 10 and cut the sheet 2 by lowering a suction head 5 and a cutting blade 6 fitted to the periphery of the suction head 5, and the release step to release the cut sheet 2 from the carrier sheet 1 by making the ascent of the suction head 5 and the cutting blade 6. In the release step, the cutting blade 6 is made to ascend and the suction head 5 is made to ascend when the tip of the cutting blade 6 passes through the lower dead spot of the suction head 5 or right after the passage. COPYRIGHT: (C)2004,JPO
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