| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin cleaner for properly cleaning and drying a substrate. SOLUTION: The spin cleaner comprises a turn table 2 rotatable around a vertical axis O, a drive unit 3 for revolving the table 2, and a retainer 4 placed above the turn table 2 to hold horizontally the substrate B separately from the table 2 in a state that the upper and the lower faces of the substrate B are exposed. The spin cleaner comprises further a glove box 5 covering the side of the turn table 2, a cleaning-solution supply device 6 for supplying a cleaning solution on the surface of the substrate B, and a gas-supply device 7 for supplying clean gas on the surface of the substrate B. The turn table 2 is concentrically rotatably attached to the top end 11a of a spindle body 11 in the drive unit 3. A power source (not shown) such as a motor is provided for driving the spindle body 11. A ventilation port 12 communicates with the vicinity of the center of rotation in the upper part from the lower side to the upper side. COPYRIGHT: (C)2004,JPO
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