| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder by which a flexible thin plate top substrate such as a plastic substrate used for, for example, a liquid crystal display panel is held flatly in a substrate processing apparatus, and the substrate processing apparatus using the substrate holder. SOLUTION: The substrate holder 18 holds the plastic substrate 19 in the substrate processing apparatus. The substrate holder 18 is equipped with an auxiliary plate 16 which receives a surface 19b of the plastic substrate 19 on the opposite side from a processed surface 19a and a pressing means 17 which presses a beltlike part 33 of the plastic substrate 19 provided on the auxiliary plate 16 against the auxiliary plate 16. The pressing means 17 presses the beltlike part 33 against the auxiliary plate 16 with the weight of the pressing means 17. COPYRIGHT: (C)2004,JPO
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