发明名称 ADHESIVE SHEET, SEMICONDUCTOR DEVICE, AND ITS PRODUCTION METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an adhesive sheet which acts as a dicing tape in a dicing step, exhibits excellent bonding reliability in the step of bonding a semiconductor element to a supporting member, and has heat resistance, humidity resistance, and excellent workability. <P>SOLUTION: The adhesive sheet is prepared by laminating (1) a radiation-polymerizable pressure-sensitive adhesive layer containing an epoxy resin and an epoxy resin curing agent, a high-molecular-weight component having a weight-average molecular weight of 100,000 or higher, and a radiation-polymerizable compound obtained by reacting (a) a diamine represented by formula (I) with (b) an isocyanate represented by formula (II) and (c) a compound represented by formula (III), (2) an epoxy resin and an epoxy resin curing agent, and (3) a support film in the given order. In formulae (I), (II), and (III), R<SP>1</SP>is a 2-30C divalent organic group; n is an integer of 0 or 1; and R<SP>2</SP>is a 1-30C divalent or trivalent organic group. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004035841(A) 申请公布日期 2004.02.05
申请号 JP20020198230 申请日期 2002.07.08
申请人 HITACHI CHEM CO LTD 发明人 KAWAKAMI HIROYUKI;MASUKO TAKASHI;INADA TEIICHI;OKUBO KEISUKE
分类号 C09J7/02;C09J133/14;C09J163/00;C09J175/04;C09J175/14;H01L21/301;H01L21/52;(IPC1-7):C09J7/02 主分类号 C09J7/02
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