发明名称 Single crystal pulling apparatus
摘要 To impart flexibility suitable for recovery of a quartz crucible to a divided type graphite crucible and avoid damage to the quartz crucible due to the flexibility. A graphite crucible 10 is divided into two or more parts by radial dividing lines 14. An opening 11a is provided in a center of a bottom of the graphite crucible 10. A protrusion 21 fitting into the opening 11a is provided on a crucible placing surface of a crucible tray 20. An inner diameter d2 of the opening 11a is 0.04 to 0.9 times an inner diameter d1 of a straight body portion of the graphite crucible 10. An outer diameter D2 of the crucible tray 20 is 0.5 or more times an outer diameter D1 of the straight body portion of the graphite crucible 10. Minimum thickness of the crucible tray 20 is 15 mm or more.
申请公布号 US6689213(B2) 申请公布日期 2004.02.10
申请号 US20020096314 申请日期 2002.03.13
申请人 SUMITOMO MITSUBISHI SILICON CORPORATION 发明人 KUBO TAKAYUKI;MAKIYAMA KATSUHITO;YABUSAME TATSUYA
分类号 C30B15/10;C30B29/06;(IPC1-7):C30B15/00 主分类号 C30B15/10
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