SYSTEM FOR AND METHOD OF AUTOMATICALLY INSPECTING SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method of automatically inspecting an X-ray mask or an equivalent electrically conductive substrate using charged particles at low cost.

SOLUTION: By measuring the position of the substrate, a charged-particle beam is accurately positioned on the substrate. The charged-particle beam is deflected to a desired position of the measured substrate. The desired position of the surface of the substrate is scanned with the charged-particle beam. As a result, at least one type of charged particles are detected among secondary charged particles generated from the top surface and the bottom surface of the substrate, back scattered charged particles, and transmitted charged particles. The substrate is automatically inspected using charged particles according to the steps.

COPYRIGHT: (C)2004,JPO