METHOD AND DEVICE FOR PRODUCT PROGRESS CONTROL

摘要

PROBLEM TO BE SOLVED: To control a progress state of the processing of a product according to the progress states of processes of relative products.

SOLUTION: A process state managing means 11 manages the states of processes of respective lots of a plurality of process devices constituting an LSI development trial manufacturing line as product process state information. A progress state gathering means 12 gathers the progress state of the process of a first lot on the basis of the product process state information. A process plan extracting means 13 extracts the process plan of the first lot from previously set process plans of respective lots. A process priority changing means 14 changes the process priority of the second lot relating to the first lot on the basis of the result of comparison between the progress state of the process of the first lot and the process plan of the first lot.

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