| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical sensor unit which is not influenced by an electric noise. <P>SOLUTION: High-frequency connectors 22 and 24 are mounted on the outer side surface of a sensor chassis 20 of the optical sensor unit. A metal plate 26 whose both ends are connected to inner conductors of the high-frequency connectors 22 and 24 is fixed inside the sensor chassis 20. A current sensor which is composed of a total reflection mirror 32, a current sensor 34, and a total reflection mirror 36 and which measures a high-frequency current and a voltage sensor which is composed of a total reflection mirror 44, a voltage sensor 46, and a total reflection mirror 48 and which measures a high-frequency voltage are fixed on the upper surface of the metal plate 26. An electrode 58 connected to the sensor chassis 20 is provided to the upper surface of the voltage sensor 46. External laser light is incident on the total reflection mirrors 32 and 44 through optical fibers 38 and 50, and signal light emitted from the total reflection mirrors 36 and 48 is taken out to the outside through optical fibers 40 and 52. <P>COPYRIGHT: (C)2004,JPO</p> |
