发明名称 QUARTZ CRUCIBLE AND ITS MANUFACTURING METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a quartz crucible with which a silicon single crystal can be stably pulled, and the DF ratio can be enhanced. <P>SOLUTION: In the bowl-shaped quartz crucible having an opening part at its one end, and below the opening part, a straight diameter part, a small radiused part and a bottom part, no unmelted raw material powder exists substantially, further the center line average roughness Ra is 6-14μm, and the maximum height Ry is 40-70μm on the outer peripheral wall surface in the length area corresponding to at least 25% of total height from the bottom face to the end face of the opening part. The bowl-shaped quartz crucible is manufactured by melting the inner wall surface formed from a raw material powder arranged in a bowl shape in a mold, and then blowing an aqueous dispersion containing dispersed abrasive particles onto the outer surface of the obtained quartz crucible to remove the unmelted raw material powder on the the outer surface of the crucible. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004107163(A) 申请公布日期 2004.04.08
申请号 JP20020274698 申请日期 2002.09.20
申请人 TOSHIBA CERAMICS CO LTD 发明人 KIKUCHI TOSHIYUKI;ITO KIYOMI;YAMAGUCHI HIROYUKI;ODA NAGAHISA
分类号 C03B20/00;C30B15/10;C30B29/06;(IPC1-7):C30B29/06 主分类号 C03B20/00
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