| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspection apparatus used for an inspection process of a semiconductor manufacturing apparatus and inspecting a fine electronic circuit pattern in a semiconductor chip formed on a wafer. SOLUTION: A moving part places an inspection object having the pattern. An imaging part picks up an image of the inspection object placed by the moving part. A calculating and processing means processes the image picked up by the imaging part, extracts the pattern of the inspection object from the image picked up by the imaging part, implements a layer edit process for the pattern of the inspection object and sets an area. COPYRIGHT: (C)2004,JPO |
