| 摘要 |
PURPOSE: Provided is a siloxane-based resin. from which an interlayer dielectric having a low dielectric constant and excellent mechanical properties can be obtained. CONSTITUTION: The siloxane-based resin is prepared by hydrolysis and polycondensation of: a cyclic siloxane compound of formula 1 as a unit (a); a silane compound of the formula of R'SiX1X2X3 as a unit (b), in which R' is H, a C1-C3 alkyl, a C3-C10 cyclic alkyl or a C6-C15 aryl, and each of X1, X2 and X3 independently represents a C1-C10 alkoxy or halogen; and a silane compound of the formula of R'SiX1X2X3 as a unit (c), in which R' is a C1-C3 fluoro-, phenyl- or cyano-containing alkyl or aryl, and each of X1, X2 and X3 independently represents a C1-C10 alkoxy or halogen, in an organic solvent in the presence of a catalyst and water: wherein R is H, a C1-C3 alkyl, a C3-C10 cyclic alkyl or C6-C15 aryl; each of X1, X2 and X3 independently represents H, a C1-C3 alkyl, C1-C10 alkoxy or halogen with the proviso that at least one of them is a C1-C10 alkoxy or halogen; m is an integer of 1-10; and n is an integer of 3-8. |
