| 摘要 |
PROBLEM TO BE SOLVED: To provide a light absorption spectroscopic microscope utilizing an evanescent wave capable of acquiring two-dimensional information of a light absorption spectrum near the surface or near the interface simply, nondestructively in a short time. SOLUTION: In this absorption spectroscopic microscope 1, light emitted from a light source 2 is condensed by an incident side lens system 3, and allowed to enter a measuring trapezoid prism 5 in a wavelength range having a fixed width. One-time total reflection is performed by the measuring trapezoid prism 5. The evanescent wave is generated by performing the total reflection, and light absorption spectral characteristic near the interface of the measuring trapezoid prism 5 can be acquired. The measuring trapezoid prism 5 or the incident side and outgoing side lens systems 3, 6 are scanned along X, Y-axes. Light totally reflected and emitted from the measuring prism 5 is spectrally diffracted by a CCD spectroscope 7, and light absorption data are edited by a computer 9, to thereby generate the two-dimensional information. Then, the information is displayed on a screen. COPYRIGHT: (C)2004,JPO |
