| 摘要 |
PURPOSE: Semiconductor device manufacturing equipment is provided to prevent the contamination due to many kinds of gases and by-products and prolong the lifetime of each part by using a guiding part. CONSTITUTION: Semiconductor device manufacturing equipment includes a guiding part(64) having a lower temperature than other parts. Preferably, at least one guiding part is used for the equipment and the guiding part is capable of being replaced with another. Preferably, a coolant supply line(66) is connected with the guiding part for conserving an aiming temperature state. Preferably, the guiding part is installed at the lower portion of a loaded wafer in a chamber. Preferably, the guiding part is installed near to a gas exhaust portion.
|
