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摘要
申请公布号
JP3537273(B2)
申请公布日期
2004.06.14
申请号
JP19960198666
申请日期
1996.07.29
申请人
发明人
分类号
H01L21/28;H01L21/3205;H01L23/52;(IPC1-7):H01L21/28;H01L21/320
主分类号
H01L21/28
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