发明名称 Semiconductor device including nitride layer
摘要 A semiconductor device includes an n-type semiconductor substrate including a source region and a drain region in a main surface thereof, a high-permittivity insulator film including a high permittivity material and formed to cover an upper side of a region of the main surface of n-type semiconductor substrate, which region is interposed between source region and drain region. And the semiconductor device includes a boron-doped gate electrode formed above high-permittivity insulator film, and a high-permittivity nitride layer formed between high-permittivity insulator film and boron-doped gate electrode.
申请公布号 US6756647(B2) 申请公布日期 2004.06.29
申请号 US20030370530 申请日期 2003.02.24
申请人 RENESAS TECHNOLOGY CORP. 发明人 INOUE MASAO;TERAMOTO AKINOBU;TSUCHIMOTO JUNICHI
分类号 H01L29/78;H01L21/28;H01L29/51;(IPC1-7):H01L29/76 主分类号 H01L29/78
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