ORGANIC ELECTRO-LUMINESCENCE DEPOSITION APPARATUS

摘要

PURPOSE: An organic electro-luminescence deposition apparatus is provided to deposit easily an organic thin film by minimizing a contact area between a crucible and a heating block body. CONSTITUTION: An organic electro-luminescence deposition apparatus includes a cylindrical heating block(400). The cylindrical heating block is partially inserted from the outside of a chamber into the inside of the chamber. A cooling groove(63), an inner wall(61a), a heater(65), and a crucible(67) are formed in the inside of the cylindrical heating block. The crucible is formed obliquely to the same height as a heating block body(61) of the inside of the heater. The crucible is separated from the heating block body.