CHAMBER ASSEMBLY FOR FABRICATING SEMICONDUCTOR DEVICE TO IMPROVE COUPLING STRUCTURE BETWEEN BODY AND COVER

摘要

PURPOSE: A chamber assembly for fabricating a semiconductor device is provided to prevent damage of a body and a cover for covering an open part of the body by improving a coupling structure between the body and the cover. CONSTITUTION: A body(22) includes an open upper part and is formed with a shape of a container. A cover(26) is used for covering the open upper part of the body. A plurality of guide grooves(28) are formed on an upper part of the body. A lower part of a guide(30) is inserted into the guide grooves. An upper part of the guide penetrates the cover. A handle is coupled to an upper end of the guide projected from the upper part of the cover.