Semiconductor optical device e.g. semiconductor optical amplifier, manufacturing method, involves forming semiconductor layer comprising uniform thickness in one zone and varying thickness in another zone, above protection layer

摘要

The method involves uniformly growing an active layer (4) above a lower cladding layer (3), and forming a semiconductor layer above a protection layer (5) that is grown above the active layer. The semiconductor layer has a thickness progressively varying according to longitudinal axis in a zone and a uniform thickness in another zone, where the active layer has a uniform thickness.