TRANSPARENT CONDUCTIVE COMPOSITE THIN FILM STRUCTURE AND METHOD FOR FORMING THE SAME

摘要

PURPOSE: A transparent conductive composite thin film structure and a method for forming the thin film structure are provided to remarkably improve the surface roughness of a transparent thin film. CONSTITUTION: A transparent conductive composite thin film structure(100) includes a transparent substrate(110) and a graded composition layer(130). The graded composition layer is formed on the transparent substrate and includes ZnO and ITO. The composition rate of the ZnO is gradually decreased from the bottom of the graded composition layer to the top of the layer. The composition rate of the ITO is gradually increased from the bottom to the top of the graded composition layer. The thin film structure further includes a ZnO thin film(120) formed between the transparent substrate and graded composition layer and an ITO thin film(140) formed on the graded composition layer.