| 摘要 |
PURPOSE: A four-component system thin film electrolyte for a lithium secondary battery, its preparation method and a thin film sensor and a microsensor containing the electrolyte are provided, to improve chemical stability, durability and ion conductivity by forming a N-containing lithium silicon oxynitride layer. CONSTITUTION: The four-component system thin film electrolyte comprises Li, Si, O and N, wherein Si forms a network frame and N modifies the frame of network to form a net structure. Preferably the four-component system thin film electrolyte is represented by Li_x SiO_y N_z, and has an amorphous structure, wherein x is 1.5-4, y is 0.5-3.9, and z is 0.1-1.5. The method comprises the steps of forming a target capable of providing Li, Si and O; and sputtering it under N2 atmosphere or N2-containing atmosphere. Preferably the target capable of providing Li, Si and O is selected from the group consisting of Li2SiO3, Li4SiO4 and their mixture. Also the method comprises the steps of forming a target capable of providing Li, Si, O and N; and sputtering it under N2 atmosphere or N2-containing atmosphere, inert gas atmosphere or O2 atmosphere. |
